Micro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation

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TitreMicro–Nanostructured TiN Thin Film: Synthesis from a Photo-Patternable TiO2 Sol–Gel Coating and Rapid Thermal Nitridation
Type de publicationJournal Article
Year of Publication2020
AuteursValour, A., M. A. Usuga Higuita, N. Crespo-Monteiro, S. Reynaud, M. Hochedel, D. Jamon, C. Donnet, and Y. Jourlin
JournalThe Journal of Physical Chemistry C
Volume124
Ticket46
Pagination25480 - 25488
Date Published07/2021
ISSN1932-7447
DOI10.1021/acs.jpcc.0c07157
Short TitleJ. Phys. Chem. C
Indéfini